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Mass Flow Controller×日立Astemo＆ナガノ - List of Manufacturers, Suppliers, Companies and Products

Mass Flow Controller Product List

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Aera FC-R7700 Series Mass Flow Controller

Aera FC-R7700 Series Mass Flow Controller

High-precision rubber seals with excellent cost-effectiveness.

In the markets for semiconductors, FPD, data storage devices, industrial vacuum equipment, industrial coatings, and others, applications using non-corrosive gases are being developed, including CVD, PVD, etching, ion implantation, sputtering, thermal oxidation films, optical glass coatings, optical fibers, surface treatments, and other coating processes. The FC-R7700 series supports the smooth operation of process and equipment engineers with high reliability and excellent performance.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Aera FC-R7800 Series Mass Flow Controller

Aera FC-R7800 Series Mass Flow Controller

High-precision and reliable metal seal model

The FC-R7800 series not only provides high-precision flow control but also features excellent high airtightness with metal seals, making it suitable for major gas control applications. It offers the convenience of choosing between industry-standard or Aera's proprietary electrical connections, allowing for quick and easy replacement of existing mass flow controllers (MFCs).

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Aera Transformer Digital Mass Flow Controller

Aera Transformer Digital Mass Flow Controller

Versatile MFC that contributes to cost reduction.

The Aera Transformer digital mass flow controllers (MFC) and digital mass flow meters (MFM), suitable for various applications such as CVD, PVD, diffusion, and etching, contribute to your process improvements by achieving excellent flexibility and efficiency, thereby enhancing yield, increasing productivity, and reducing costs. Equipped with new sensor and valve technologies, proven core components in the field, and high-speed digital circuits, they enable precise gas flow control. They boast outstanding reliability, exceptional responsiveness, accuracy, and reproducibility, and offer a versatile range of single gas and multi-gas, multi-range MFCs tailored to the values and functions prioritized by our customers.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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Aera FC-DR980 Digital Mass Flow Controller

Aera FC-DR980 Digital Mass Flow Controller

Advanced digital MFC/MFM with excellent versatility, compatible with many systems.

To be used in accordance with existing main control methods and communication methods, analog or digital control is performed according to various output forms. This product is available in a single gas model and a multi-gas, multi-range model to meet customer requirements. The multi-gas, multi-range model contributes to a significant reduction in spare MFC inventory, thereby achieving cost reduction. Additionally, to comprehensively monitor and control flow rates, it utilizes RS-485 communication functionality (with RS-232 communication functionality via a converter) and multiple diagnostic and alarm functions, allowing for quick access to operational parameters.

  • CVD Equipment
  • Sputtering Equipment
  • Etching Equipment

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